cMUT/pMUT transform an electrical signal into an acoustic one, through a membrane mechanical complex movement. Measurement of their 3D topography time-sequence along the phase of the excitation signal is needed for understanding the energy transfer processes.

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cMUT array reliability test
SAW with sub 10 nm vibration
  • Courtesy of UC Davis
  • Devices SAW, cMUT, pMUT
  • Instrument DHM® R-1000
  • Magnification 5x