A MEMS microphone is composed by a diaphragm vibrating between one or two holed back-plates. Measurement of topography and vibration modes of each the diaphragm is challenging. High lateral resolution is required in order to measure diaphragm through the back-plate holes.

We demonstrate the full field vibration maps of both diaphragm and back-plates versus frequency with mage pixel data points.

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Single point Bode analysis generalized to amplitude 3D maps with mega pixel resolution versus frequency
  • Courtesy of
  • Device MEMS Microphone
  • Instrument DHM® R-1000 with UV source
  • Magnification 10x